520.494/580.495 Fall 1998 Microfabrication Laboratory
Homework Assignment #2
Reading: Chapter 3 of Jaeger
Do problems 3.1 through 3.9 in the textbook. Note changes below.
3.6 Use a spreadsheet program such as Microsoft Excel for the calculation. Set up a table like the one below.
|
Dry |
Wet |
|||
|
Temp |
Linear |
Parabolic |
Linear |
Parabolic |
|
950 |
||||
|
1000 |
||||
|
1050 |
||||
|
1100 |
||||
|
1150 |
||||
|
1200 |
3.9 Use a spreadsheet program such as Microsoft Excel for the calculation. Set up a table like the one below.
|
Oxide thickness |
0.5 |
microns |
||
|
Dry |
Wet |
|||
|
Temp |
<100> |
<111> |
<100> |
<111> |
|
950 |
||||
|
1000 |
||||
|
1050 |
||||
|
1100 |
||||
|
1150 |
||||
|
1200 |