Laboratory Assignments
To accommodate the large number of students enrolled in this course, two lab projects will be run in parallel. The two projects are: optical waveguides and the flow cytometer. These have similar process flows but are staggered in such a way to avoid conflicts with major equipment and instrumentation. In the laboratory schedule shown in the table below, Lab #X_WG refers to the optical waveguides and Lab #X_CY to the flow cytometer. Laboratory assignments Lab #1a and Lab #1b are common to both projects. Here is some guidelines on what to include in the prelab, postlab as well as the lab report.
Week 1
No lab sessions.
Week 2
Lab #1a: Laboratory orientation and instrumentation.
Week 3
Lab #1b: Introduction to CAD tools for mask design. Please download Lab1bFiles (zip archive) that includes templates for the CAD tools. Account passwords for computer lab will be given to students by T.As. during lab sections.
Note: When you download password protected pdf and zip files under Mac OSX, sometimes the file will fail to open upon clicking on it. Download the file instead on the desktop and open it there, do not open directly from the browser window.
Week 4
Lab #2_FC: (Lithography I)
Lab #2_WG: (Oxidation I)
Week 5
Lab #3_FC: (KOH etch), Seidel Paper (pdf)
Lab #3_WG: (Lithography I)
Week 6
Lab #4_FC: (Oxidation I)
Lab #4_WG: (KOH etch), Seidel Paper (pdf)
Week 7
Lab #5_FC: (Alluminum evaporation)
Lab #5_WG: (Oxidation II)
Week 8
Lab #6_FC: (Lithography II, metal patterning)
Lab #6_WG: (Shadow mask Aluminum evaporation)
Week 9
Lab #7_FC: (Lithography III, oxide removal)
Lab #7_WG: (SU-8 deposition and patterning)
Week 10
Lab #8_FC: (Anodic Bonding)
Lab #8_WG: (Wafer Dicing)
Week 11
Packaging and preparation for testing.
Week 12
Testing and experimental results analysis.
Week 13
Class presentations and discussion.