Lecture Notes and Reading Assignments
All reading assignments refer to the 2nd edition of the book.
Week 1 (8/31)
Organizational meeting, discussion of course objectives and structure. Introduction to microfabrication, clean room, review of safety and clean room procedures. Handout #1a: Introduction to Microfabrication (pdf), Handout #1b: Clean room environment (pdf)
Homework Assignment #1 (Due 9/7): Cleanroom safety (pdf) and solutions (pdf).
Week 2 (9/7)
Discussion of laboratory projects. Handout #2a: Project overview (pdf), Handout #2b: Flow Cytometer on a Chip (pdf), Handout #2c: Optical Waveguides in Silicon (pdf). Reading assignment: book chapter 1, chapter 2, sections 2.2, 2.4 and 2.7
Homework Assignment #2 (Due 9/14): Silicon and project (pdf) and solutions (pdf).
Week 3 (9/14)
Thermal oxidation. Handout #3: Thermal Oxidation (pdf). Reading assignment: book chapter 4, sections 4.1, 4.2, 4.3, 4.4, 4.9
Homework Assignment #3 (Due 9/21): Thermal oxidation (pdf) and solutions (pdf).
Week 4 (9/21)
Handout #4: Photolithography I (pdf). Reading: book chapter 7 sections 7.1, 7.2, 7.3, 7.4, 7.5, 7.6, 7.9, 7.10
Homework Assignment #4 (Due 9/28): Photolithography I (pdf) and solutions (pdf).
Week 5 (9/28)
Handout #5: Photolithography II (pdf). Reading: book chapter 8 sections 8.1, 8.2, 8.3, 8.4, 8.5, 8.6, 8.9; book chapter 9 sections 9.1, 9.2, 9.3
Homework Assignment #5 (Due 10/5): Photolithography II (pdf) and solutions (pdf).
Week 6 (10/5)
Handout #6a: Wet Etching (pdf). Reading: book chapter 11 section 11.1; book chapter 19 section 19.5, Petersen paper section III (pdf), Williams/Muller paper (pdf), Madou handout (pdf).
Homework Assignment #6 (Due 10/12): Wet Etching (pdf) and solutions (pdf).
Week 7 (10/12)
Handout #7: Thin Film Deposition (pdf). Reading: book chapter 12 section 12.1, 12.2, 12.3, 12.4, 12.5, 12.6, 12.7, 12.14; book chapter 13 section 13.1, 13.2
Homework Assignment #7 (Due 10/19): Thin Films (pdf) and solutions (pdf).
Week 8 (10/19)
Handout #8: Etching II: Dry Etching (pdf). Reading: book chapter 11 section 11.3, 11.4, 11.5, 11.6, 11.7, 11.10
Week 9 (10/26)
Midterm Examination: In class examination, open notes, open books on all topics up to and including dry etching. Dry etching questions are going to be qualitative in nature. Students are also expected to answer questions on the lab work and their lab project. Make sure you have with you your handouts posted on the web for the material not in the book. Preparation of a summary sheet ot help you find the material during the exam is strongly advised. Midterm Solutions (pdf).
Week 10 (11/2)
Handout #9: Diffusion, Ion-implantation (pdf). Reading: book chapter 3 section 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.8; book chapter 5 section 5.1, 5.2, 5.3, 5.8
Week 11 (11/9)
Handout #10: Softlithography and Micromolding (pdf)
Week 12 (11/16)
Handout #11: Packaging (pdf) and Advanced Packaging (pdf). Reading: book chapter 16, sections 16.1, 16.2, 16.3, 16.4.
Week 13 (11/30)
Advanced Topics in Micro and Nano fabrication. Handout #12: CMOS and MEMS Technologies (pdf), Reading: book chapter 19, sections 19.6, 19.7, 19.8, 19.9.
Final Project (Due: December 12th, 5 p.m.)
Microfabrication; Energy, Materials and Environment. The purpose of the final project and report is (i) to reinforce your understanding of how your microfabricated device was constructed, and (ii) to investigate the broader impacts of microfabrication processes (economic and environmental).
You are allowed to discuss the paper with your fellow students BUT you must do the calculations and report on your own! Keep a tally and report the amount of time that you have worked on this final project and report.
Reading: NATURE editorial (pdf), paper (pdf) and support material (pdf): The 1.7 Kilogram Microchip: Energy and Material Use in The Production of Semiconductor Devices, E. D. Williams, R.U. Ayres, and M. Heller, Environmental Science and Technology, October 24th, 2002.
Question 1: Do a critical review/summary of the paper (1 page)
Question 2: Based on the information given in the paper and references therein AND your laboratory notes
i) Summarize your project work in a process flow diagram.
ii) Construct a diagram for your class project (similar to that shown in Figure 1 of the paper).
iii) Calculate the material amount for fabricating your chip (see Figure 2 of the paper).
iv) Calculate the energy costs for production and use for your chip (see Figure 3 of the paper).
The report, including figures, should be no longer than 5 single space typeset pages long. Use an excel spreadsheet to do the calculations.
PLEASE SEND ELECTRONIC VERSION (pdf and excel files) TO jhu495 at gmail dot com, or jhu773 at gmail dot com if you are enrolled in the graduate level course. Please use your last name as the name of the files. For example andreou.pdf and andreou.xls